The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 13, 2021

Filed:

Mar. 12, 2019
Applicant:

Coorstek Kk, Tokyo, JP;

Inventors:

Seiichi Fukuoka, Hadano, JP;

Hiroki Watanabe, Hadano, JP;

Assignee:

COORSTEK KK, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 39/20 (2006.01); B01D 46/00 (2006.01); B01D 46/10 (2006.01); C04B 38/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B01D 39/2075 (2013.01); B01D 46/0001 (2013.01); B01D 46/10 (2013.01); C04B 38/0041 (2013.01); C04B 38/0054 (2013.01); B01D 2239/10 (2013.01); B01D 2239/1216 (2013.01); B01D 2275/202 (2013.01); B01D 2275/406 (2013.01); H01L 21/67017 (2013.01);
Abstract

A silicon carbide porous body includes a skeletal structure formed by a plurality of silicon carbide particles bonded to each other, a plurality of pores formed by the skeletal structure, neck parts formed by surface-contacting of adjacent silicon carbide particles, and an average pore size is larger than 3 μm and equal to or smaller than 9 μm, and a porosity ranges from 35% to 55%. A break filter using the silicon carbide porous body enables high performance of collection of particles, prevention of soaring up of particles, and shortening of a restoration time from the depressurized state of the chamber to the atmospheric state.


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