The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 06, 2021

Filed:

Mar. 26, 2018
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Koji Ohashi, Matsumoto, JP;

Takahiro Kamijo, Matsumoto, JP;

Katsuhiro Imai, Minowa, JP;

Takumi Yamaoka, Chino, JP;

Chikara Kojima, Matsumoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2006.01); H01L 41/053 (2006.01); H01L 41/187 (2006.01); H01L 41/09 (2006.01); H01L 41/29 (2013.01); B06B 1/06 (2006.01); G01N 29/24 (2006.01); A61B 8/12 (2006.01); A61B 8/06 (2006.01); B06B 1/02 (2006.01); B41J 2/14 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0475 (2013.01); A61B 8/06 (2013.01); A61B 8/12 (2013.01); B06B 1/0215 (2013.01); B06B 1/067 (2013.01); B06B 1/0622 (2013.01); G01N 29/245 (2013.01); H01L 41/047 (2013.01); H01L 41/0477 (2013.01); H01L 41/0533 (2013.01); H01L 41/09 (2013.01); H01L 41/0973 (2013.01); H01L 41/1876 (2013.01); H01L 41/29 (2013.01); B06B 2201/76 (2013.01); B41J 2/14201 (2013.01);
Abstract

A piezoelectric element has a first electrode layer, a piezoelectric layer on the first electrode layer, a second electrode layer on the piezoelectric layer, a third electrode layer on part of the second electrode layer and including third metal, and an insulating layer covering at least a part of the piezoelectric layer not provided with the second electrode layer and having an aperture exposing a part of the second electrode layer. The second electrode layer has a first layer including first metal and a second layer including second metal on the first layer. The second layer is exposed in the aperture. A difference in standard redox potential between the second metal and the third metal is smaller than a difference in standard redox potential between the first metal and the third metal.


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