The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 06, 2021

Filed:

Mar. 07, 2019
Applicant:

Toshiba Memory Corporation, Tokyo, JP;

Inventor:

Tetsu Morooka, Yokkaichi Mie, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/1157 (2017.01); H01L 27/11524 (2017.01); G11C 16/04 (2006.01); H01L 27/11551 (2017.01); H01L 27/11578 (2017.01);
U.S. Cl.
CPC ...
H01L 27/1157 (2013.01); G11C 16/0483 (2013.01); H01L 27/11524 (2013.01); H01L 27/11551 (2013.01); H01L 27/11578 (2013.01);
Abstract

According to one embodiment, a semiconductor memory device includes: a substrate; a plurality of wiring layers stacked via a plurality of insulating layers above the substrate, the wiring layers having an opening extending in a direction perpendicular to the substrate, each of the wiring layers including a first face recessed in a first direction, a second face recessed in a second direction, third face recessed in a third direction, and a fourth face recessed in a fourth direction; a block insulating film provided to be in contact with each of the first to fourth faces; a charge storage film provided on a side face of the block insulating film; a tunnel insulating film provided on a side face of the charge storage film; and a semiconductor film provided on a side face of the tunnel insulating film.


Find Patent Forward Citations

Morooka, Tetsu. (2021). Semiconductor memory device (U.S. Patent No. 10971510). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10971510

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…