The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 06, 2021

Filed:

May. 12, 2017
Applicant:

Stephan Wege, Bannewitz-Cunnersdorf, DE;

Inventor:

Stephan Wege, Bannewitz-Cunnersdorf, DE;

Assignee:

Other;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01J 37/075 (2006.01); H01J 37/34 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32449 (2013.01); H01J 37/075 (2013.01); H01J 37/3467 (2013.01); C23C 16/4557 (2013.01);
Abstract

The invention relates to a gas injector () for supplying gas or a gas mixture to a reaction region (). The gas injector () contains a main part () with a gas channel (). Furthermore, a gas feed () is provided for the gas channels (). The gas or the gas mixture reaches the reaction region () from the gas channel () via a first opening () or a first group () of openings () in the main part. The main part () is equipped with a second opening () or a second group () of openings () via which the gas of the gas mixture likewise reaches the reaction region () from the gas channel (). Each of the openings () or the groups () of openings () is paired with a respective separate gas feed () in the main part () on the gas channel ().


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