The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2021
Filed:
Aug. 03, 2018
Applicant:
Kabushiki Kaisha Nihon Micronics, Musashino, JP;
Inventor:
Osamu Arai, Musashino, JP;
Assignee:
Kabushiki Kaisha Nihon Micronics, Musashino, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/00 (2006.01); G01R 31/44 (2020.01); G01R 31/28 (2006.01); G01R 31/26 (2020.01); H05B 47/20 (2020.01);
U.S. Cl.
CPC ...
G01R 31/44 (2013.01); G01R 31/2635 (2013.01); G01R 31/2865 (2013.01); G01R 31/2886 (2013.01); H05B 47/20 (2020.01);
Abstract
A test system is characterized by a holding unit that holds a light-receiving unit receiving light emitted from a test object and an optical path forming unit that is formed with an optical transmission path as a path of the light received by the light-receiving unit, in which the optical transmission path is formed of a different member from the light-receiving unit. Since the test system has such a configuration, replacement of the light-receiving unit that receives the light emitted from the test object can be facilitated.