The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2021
Filed:
Feb. 06, 2019
Applicant:
National Technology & Engineering Solutions of Sandia, Llc, Albuquerque, NM (US);
Inventors:
Eric John Schindelholz, Albuquerque, NM (US);
Patrick Sean Finnegan, Albuquerque, NM (US);
Assignee:
National Technology & Engineering Solutions of Sandia, LLC, Albuquerque, NM (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/327 (2006.01); B81C 1/00 (2006.01); G01N 17/04 (2006.01); G01N 27/416 (2006.01); H05K 3/00 (2006.01);
U.S. Cl.
CPC ...
G01N 27/3275 (2013.01); B81C 1/00095 (2013.01); G01N 17/04 (2013.01); G01N 27/4163 (2013.01); H05K 3/00 (2013.01); B81C 2201/0125 (2013.01); B81C 2201/0194 (2013.01); H01L 2221/68304 (2013.01); H01L 2221/68359 (2013.01);
Abstract
The present invention relates to a method of fabricating an electrode array, in which an underlying handle wafer is removed to provide a planar device having the electrode array. Also provided are wafers including a plurality of planar devices having an electrode array, as well as sensors including such an electrode array.