The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 06, 2021

Filed:

Apr. 28, 2017
Applicant:

Tokyo Institute of Technology, Tokyo, JP;

Inventors:

Yukio Kawano, Tokyo, JP;

Daichi Suzuki, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/42 (2006.01); G01J 5/04 (2006.01); G01N 21/35 (2014.01); H01L 51/00 (2006.01); G01N 21/3586 (2014.01);
U.S. Cl.
CPC ...
G01N 21/3586 (2013.01); G01J 3/42 (2013.01); G01J 5/046 (2013.01); H01L 51/0048 (2013.01);
Abstract

A terahertz wave detection device includes a low-dimensional electron system material formed on a substrate; and a first electrode and a second electrode opposingly arranged on a two-dimensional plane of the low-dimensional electron system material. The first electrode and the second electrode are made of metals having different thermal conductivity. An 8-element array sensor includes eight terahertz wave detection devices aligned in an array. The terahertz wave detection device includes carbon nanotube film; a first electrode disposed on one side of the carbon nanotube film; and a second electrode disposed on the other side of the carbon nanotube film. The first electrode and the second electrode have different thermal conductivity.


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