The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 06, 2021

Filed:

Jul. 22, 2019
Applicants:

Olympus Corporation, Hachioji, JP;

Nippon Telegraph and Telephone Corporation, Tokyo, JP;

Inventors:

Daichi Watanabe, Tokyo, JP;

Kei Watanabe, Tokyo, JP;

Yu Kurata, Tokyo, JP;

Satomi Katayose, Tokyo, JP;

Ryoichi Kasahara, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 9/02 (2006.01); G01B 9/02 (2006.01); G01B 11/24 (2006.01); G01B 11/25 (2006.01);
U.S. Cl.
CPC ...
G01J 9/02 (2013.01); G01B 9/0201 (2013.01); G01B 9/02007 (2013.01); G01B 9/02028 (2013.01); G01B 11/2441 (2013.01); G01B 11/2527 (2013.01);
Abstract

An illumination apparatus generates an interference fringe. An input arm receives an input light beam from a light source. A splitter splits the input light beam that has passed through the input arm into a first output arm and a second output arm. A phase modulator changes a phase difference between the output light beams of the first output arm and the second output arm. A phase detector detects the phase difference between output light beams respectively output from the first output arm and the second output arm based on a return light beam generated by combining a first reflected light beam and a second reflected light beam respectively reflected by ends of the first output arm and the second output arm.


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