The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 06, 2021

Filed:

Jan. 30, 2019
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Makoto Furuhata, Matsumoto, JP;

Hajime Tomiyama, Fujimi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/56 (2012.01); G01C 19/5649 (2012.01);
U.S. Cl.
CPC ...
G01C 19/5649 (2013.01);
Abstract

A physical quantity sensor includes a movable body and first and second detection electrodes facing the movable body with a separation distance between the movable body and the second detection electrode that is different from that between the movable body and the first detection electrode. The movable body and the first detection electrode are aligned to face one another in a first direction. Vibration of the movable body includes a drive vibration mode in which vibration in the first direction and vibration in a second direction orthogonal to the first direction are combined. To account for this drive vibration mode, an area of the second detection electrode is shifted to be greater in the second direction from its center in a plan view.


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