The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2021
Filed:
Nov. 28, 2017
Applicant:
Boe Technology Group Co., Ltd., Beijing, CN;
Inventor:
Biao Tian, Beijing, CN;
Assignee:
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/35 (2006.01); H01J 37/34 (2006.01); C23C 14/34 (2006.01); H01L 21/687 (2006.01); C23C 14/04 (2006.01); C23C 14/50 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 14/35 (2013.01); C23C 14/042 (2013.01); C23C 14/3407 (2013.01); C23C 14/50 (2013.01); H01J 37/32715 (2013.01); H01J 37/34 (2013.01); H01J 37/3435 (2013.01); H01L 21/68764 (2013.01);
Abstract
The embodiments of the present disclosure provide a substrate bearing assembly and a magnetron sputtering apparatus. The substrate bearing assembly includes: a stage; and a bearing plate provided on the stage for carrying a substrate on which a film is to be formed. A side of the bearing plate is hinged with the stage by a hinge member, and the bearing plate is able to be rotated by the hinge member to be perpendicular to a plane in which the stage is located. The hinge member is able to translate on the stage in a direction perpendicular to a side of the bearing plate connecting with the hinge member.