The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2021
Filed:
Mar. 05, 2019
Applicant:
Skc Co., Ltd., Gyeonggi-do, KR;
Inventors:
Assignee:
SKC CO., LTD., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 9/36 (2006.01); C09K 13/06 (2006.01); H01L 21/02 (2006.01); C08L 83/04 (2006.01); C07F 7/18 (2006.01); C09K 13/00 (2006.01);
U.S. Cl.
CPC ...
C09K 13/06 (2013.01); H01L 21/02054 (2013.01); C07F 7/18 (2013.01); C08L 83/04 (2013.01); C09K 13/00 (2013.01);
Abstract
Provided are a composition for a semiconductor process, which comprises a first component comprising an inorganic acid or an organic acid; and a second component comprising a silicon compound represented by Formula 1, and a semiconductor process, which comprises selectively cleaning and/or removing an organic substance or an inorganic substance using the composition.