The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2021
Filed:
Oct. 01, 2019
Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Loic Joet, Grenoble, FR;
Patrice Rey, Grenoble, FR;
Abstract
Microelectromechanical sensor with an out-of-plane detection has a cross sensitivity in a first direction in the plane with a value of S, the sensor comprising a support, a mass suspended from the support by beams stressed by bending, in such a way that the inertial mass is capable of moving with respect to the support about an axis of rotation contained in a plane of the sensor, a stress gauge suspended between the mass and the support. The bending beams have a dimension tin the out-of-plane direction and the mass has a dimension tin the out-of-plane direction such that Lis the distance between the centre of gravity of the mass and the centre of the bending beams projected onto the first direction.