The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2021
Filed:
Jun. 29, 2017
Applicant:
Teknologian Tutkimuskeskus Vtt Oy, Espoo, FI;
Inventors:
Antti Jaakkola, Espoo, FI;
Tuomas Pensala, Espoo, FI;
Aarne Oja, Espoo, FI;
Panu Pekko, Espoo, FI;
James R Dekker, Espoo, FI;
Assignee:
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY, Espoo, FI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H03H 3/007 (2006.01); H03H 9/24 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02448 (2013.01); H03H 3/0076 (2013.01); H03H 9/02393 (2013.01); H03H 9/2447 (2013.01);
Abstract
The present disclosure describes micromechanical resonator, a resonator element for the resonator, and a method for trimming the resonator. The resonator comprises a resonator element having a length, a width, and a thickness, where the length and the width define a plane of the resonator element. The resonator element comprises at least two regions () in the plane of the resonator element, wherein the at least two regions have different thicknesses.