The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 30, 2021

Filed:

Jun. 27, 2019
Applicant:

Qorvo Us, Inc., Greensboro, NC (US);

Inventors:

Jonathan Hale Hammond, Oak Ridge, NC (US);

Julio C. Costa, Oak Ridge, NC (US);

Assignee:

Qorvo US, Inc., Greensboro, NC (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/56 (2006.01); B81C 1/00 (2006.01); H01L 23/31 (2006.01); H01L 23/00 (2006.01); B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/561 (2013.01); B81B 7/0077 (2013.01); B81C 1/00333 (2013.01); H01L 21/568 (2013.01); H01L 23/3135 (2013.01); H01L 24/24 (2013.01); H01L 24/82 (2013.01); B81B 2207/012 (2013.01); B81C 2203/0136 (2013.01); B81C 2203/0154 (2013.01); B81C 2203/0792 (2013.01); H01L 2224/24101 (2013.01); H01L 2224/24137 (2013.01); H01L 2224/25171 (2013.01); H01L 2924/1461 (2013.01);
Abstract

The present disclosure relates to a packaging process to enhance performance of a wafer-level package. The disclosed package includes multiple mold compounds, a multilayer redistribution structure, and a thinned die with a device layer and die bumps underneath the device layer. The multilayer redistribution structure includes package contacts at a bottom of the multilayer redistribution structure and redistribution interconnects connecting the die bumps to the package contacts. A first mold compound resides around the thinned die to encapsulate sidewalls of the thinned die, and extends beyond a top surface of the thinned die to define an opening over the thinned die. A second mold compound resides between the multilayer redistribution structure and the first mold compound to encapsulate a bottom surface of the device layer and each die bump. A third mold compound fills the opening and is in contact with the top surface of the thinned die.


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