The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2021
Filed:
Aug. 30, 2019
Applicant:
Toshiba Memory Corporation, Tokyo, JP;
Inventors:
Kei Kobayashi, Yokohama Kanagawa, JP;
Hirokazu Kato, Kariya Aichi, JP;
Takayuki Nakamura, Machida Tokyo, JP;
Assignee:
TOSHIBA MEMORY CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/033 (2006.01); G03F 7/00 (2006.01); H01L 21/027 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0337 (2013.01); G03F 7/0002 (2013.01); H01L 21/0271 (2013.01); H01L 21/31144 (2013.01);
Abstract
According to one embodiment, an imprinting method comprises forming a carbon film on a substrate. The carbon film being oxygen in an amount of less than or equal to 15% by weight. A transfer material is dispensed over the carbon film. A patterned template is brought into contact with the transfer material. The transfer material is cured with light passing through the patterned template. The patterned template is then detached from the cured transfer material.