The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2021
Filed:
Oct. 29, 2018
Applicant:
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Inventors:
Sara Loi, Villaputzu, IT;
Alberto Pagani, Nova Milanese, IT;
Assignee:
STMICROELECTRONICS S.R.L., Agrate Brianza, IT;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01T 1/178 (2006.01); G01N 15/02 (2006.01); G01N 15/06 (2006.01); G01T 1/24 (2006.01); G01T 1/29 (2006.01); F04B 19/06 (2006.01); F04B 37/00 (2006.01); G01N 15/00 (2006.01); G01N 15/10 (2006.01); G01N 1/22 (2006.01);
U.S. Cl.
CPC ...
G01T 1/178 (2013.01); G01N 15/02 (2013.01); G01N 15/06 (2013.01); G01T 1/244 (2013.01); G01T 1/2928 (2013.01); F04B 19/06 (2013.01); F04B 37/00 (2013.01); G01N 15/0205 (2013.01); G01N 15/10 (2013.01); G01N 2001/2276 (2013.01); G01N 2015/035 (2013.01);
Abstract
A process for manufacturing an optical system includes forming a first hydrophobic surface at a semiconductor substrate, providing a first drop of transparent material having a first shape on the first hydrophobic surface, and allowing the first drop to harden to form a first optical element having the first shape. The optical system may be a particle detector, and the process may optionally further include forming a light source at the semiconductor substrate configured to generate a light beam that passes through the first optical element and a cavity to a photodetector.