The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 23, 2021

Filed:

Jul. 03, 2019
Applicant:

Hukseflux Holding B.v., Delft, NL;

Inventor:

Eric Richard Hoeksema, The Hague, NL;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 35/32 (2006.01); H01L 35/34 (2006.01); G01K 7/02 (2021.01); G01K 17/00 (2006.01);
U.S. Cl.
CPC ...
H01L 35/32 (2013.01); G01K 7/02 (2013.01); G01K 17/00 (2013.01); H01L 35/34 (2013.01);
Abstract

Heat flow sensor comprising a thermopile with a series of thermocouples and having a first side and an opposite second side, a first electrically and thermally insulating layer arranged on the first side; a second electrically and thermally insulating layer arranged on the second side; a plurality of first thermally conductive pads spaced apart from the thermopile by the first layer and extending substantially parallel to the first side; a plurality of second thermally conductive pads spaced apart from the thermopile by the second layer and extending substantially parallel to second side; a plurality of thermally conductive first pillars, wherein each first pillar extends from one of said thermocouples at least partially into the first layer and is attached to a corresponding one of the first pads and has a length greater than a thickness of the corresponding first pad.


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