The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 23, 2021

Filed:

Jul. 26, 2018
Applicant:

Sharp Kabushiki Kaisha, Sakai, JP;

Inventors:

Ryuji Matsumoto, Sakai, JP;

Yoshimasa Chikama, Sakai, JP;

Hirokazu Furukawa, Sakai, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/52 (2006.01); H01L 27/12 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1218 (2013.01); H01L 21/31116 (2013.01); H01L 27/124 (2013.01); H01L 27/1262 (2013.01);
Abstract

A substrate of the present invention sequentially includes an insulating substrate, a lower layer, a first insulating film, a second insulating film, and an upper layer. The substrate is provided with a hole reaching at least one of the lower layer or the insulating substrate through at least the first insulating film and the second insulating film. The first insulating film includes in a region with the hole a protrusion that protrudes from an end portion in contact with the first insulating film of the second insulating film. The substrate includes a stepwise structure including the protrusion and the end portion. The upper layer coats the stepwise structure. An upper surface portion of the first insulating film in a region with the protrusion and an upper surface portion of the first insulating film in a region below the end portion of the second insulating film are coplanar.


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