The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 23, 2021

Filed:

Dec. 11, 2018
Applicant:

Thermo Electron Scientific Instruments Llc, Madison, WI (US);

Inventors:

Nathaniel S. Safron, Madison, WI (US);

Matthew Wayne Meyer, Madison, WI (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); G01N 27/12 (2006.01); H01L 23/00 (2006.01); H01L 21/768 (2006.01); H01L 21/56 (2006.01); H01L 23/31 (2006.01); B82Y 15/00 (2011.01);
U.S. Cl.
CPC ...
H01L 23/481 (2013.01); B82Y 15/00 (2013.01); G01N 27/127 (2013.01); H01L 21/56 (2013.01); H01L 21/76898 (2013.01); H01L 23/3121 (2013.01); H01L 24/05 (2013.01); H01L 24/16 (2013.01); G01N 27/122 (2013.01); H01L 2224/02372 (2013.01); H01L 2224/05644 (2013.01); H01L 2224/05664 (2013.01); H01L 2224/05666 (2013.01); H01L 2224/05669 (2013.01); H01L 2224/16225 (2013.01);
Abstract

A sensing device includes a first substrate having a plurality of TSVs extending therethrough, and a second substrate positioned adjacent the first substrate, with the TSVs being electrically connected to the second substrate. At least one carbon nanotube sensor is positioned on the first substrate. Each of a plurality of contact pads is positioned on the first substrate and on one of the carbon nanotube sensors such that each contact pad is electrically connected to one of the TSVs and the one of the carbon nanotube sensors, and such that an end of the one of the carbon nanotube sensors is embedded in the contact pad.


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