The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2021
Filed:
Jan. 19, 2017
Sumitomo Osaka Cement Co., Ltd., Tokyo, JP;
Tomomi Ito, Tokyo, JP;
Yukio Miura, Tokyo, JP;
SUMITOMO OSAKA CEMENT CO., LTD., Tokyo, JP;
Abstract
An electrostatic chuck device includes: in order, an electrostatic chuck part having one principal surface serving as a placing surface on which a plate-shaped sample is placed, and having a built-in internal electrode for electrostatic attraction; a heating member bonded to a surface on the side opposite to the placing surface of the electrostatic chuck part in a pattern having gaps; a sheet material; and a base part having a function of cooling the electrostatic chuck part, in which a silicone resin sheet having a layer thickness of 10 μm or more and less than 200 μm and a Shore hardness (A) in a range of 10 to 70 is provided between the electrostatic chuck part and the heating member.