The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 23, 2021

Filed:

Oct. 10, 2019
Applicant:

Nlight, Inc., Vancouver, WA (US);

Inventors:

Robert J. Martinsen, West Linn, OR (US);

Scott R. Karlsen, Battle Ground, WA (US);

Ken Gross, Vancouver, WA (US);

Assignee:

nLIGHT, Inc., Vancouver, WA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/268 (2006.01); H01L 21/02 (2006.01); B23K 26/00 (2014.01); B23K 26/0622 (2014.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/268 (2013.01); B23K 26/0006 (2013.01); B23K 26/0624 (2015.10); H01L 21/02532 (2013.01); H01L 21/02686 (2013.01); B23K 2103/56 (2018.08);
Abstract

Laser pulses from pulsed fiber lasers are directed to an amorphous silicon layer to produce a polysilicon layer comprising a disordered arrangement of crystalline regions by repeated melting and recrystallization. Laser pulse durations of about 0.5 to 5 ns at wavelength range between about 500 nm and 1000 nm, at repetition rates of 10 kHz to 10 MHz can be used. Line beam intensity uniformity can be improved by spectrally broadening the laser pulses by Raman scattering in a multimode fiber or by applying varying phase delays to different portions of a beam formed with the laser pulses to reduce beam coherence.


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