The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2021
Filed:
Jul. 07, 2017
Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd., Guangdong, CN;
Liang Jiang, Guangdong, CN;
Abstract
The present invention discloses an evaporation source heating system including a vacuum heating container, a first heating source disposed around an outer peripheral surface of the heating container and a soaking layer disposed in the heating container, and the soaking layer is disposed opposite to an inner wall of the heating container so as to uniformly transmit heat emitted from the inner wall of the heating container. The present invention provides the soaking layer in the heating container of the evaporation source heating system, on one hand, a risk of material crack caused due to exorbitant local temperature is avoided, and on the other hand, heating uniformity is also improved. In addition, by heating the soaking layer in the heating container, time needed for realizing uniform heating is sharply shortened, and a heating state of the system is also real-time controlled more conveniently.