The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 23, 2021

Filed:

Jul. 22, 2010
Applicants:

Jürgen Leib, Neunkirchen am Brand, DE;

Ulli Hansen, Berlin, DE;

Simon Maus, Berlin, DE;

Inventors:

Jürgen Leib, Neunkirchen am Brand, DE;

Ulli Hansen, Berlin, DE;

Simon Maus, Berlin, DE;

Assignee:

MSG LITHOGLAS AG, Berlin, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); C23C 14/10 (2006.01); H01L 23/498 (2006.01); C23C 14/08 (2006.01); G02B 6/132 (2006.01); H01L 21/48 (2006.01); C23C 14/30 (2006.01);
U.S. Cl.
CPC ...
C23C 14/10 (2013.01); C23C 14/081 (2013.01); C23C 14/083 (2013.01); C23C 14/30 (2013.01); G02B 6/132 (2013.01); H01L 21/4846 (2013.01); H01L 23/49894 (2013.01); H01L 2924/0002 (2013.01); H01L 2924/09701 (2013.01); Y10T 428/24174 (2015.01); Y10T 428/24802 (2015.01); Y10T 428/24926 (2015.01);
Abstract

The invention relates to a method for producing a structured coating on a substrate, wherein the method comprises the following steps: providing a substrate having a surface to be coated and producing a structured coating on the surface of the substrate to be coated by depositing at least one evaporation coating material, namely aluminium oxide, silicon dioxide, silicon nitride, or titanium dioxide, on the surface of the substrate to be coated by means of thermal evaporation of the at least one evaporation coating material and using additive structuring. The invention further relates to a coated substrate and a semi-finished product having a coated substrate.


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