The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2021
Filed:
Dec. 27, 2018
Applicants:
Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;
Kawasaki Robotics (Usa), Inc., Wixom, MI (US);
Inventors:
Assignees:
KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe, JP;
KAWASAKI ROBOTICS (USA), INC., Wixom, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 9/16 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01); B65G 47/90 (2006.01); G05B 19/425 (2006.01);
U.S. Cl.
CPC ...
B25J 9/163 (2013.01); B25J 9/1692 (2013.01); B25J 9/1694 (2013.01); B65G 47/905 (2013.01); G05B 19/425 (2013.01); H01L 21/67259 (2013.01); H01L 21/68707 (2013.01); B65G 2203/044 (2013.01);
Abstract
A substrate transfer robot, first and second sensors are provided in a hand such that a planar-view intersection point of optical axes is located on a center of a substrate when the hand holds the substrate in planar view, and a control device operates an arm, scans a target placed at a teaching position with the first and second sensors, and acquires the teaching position when the target is located at the planar-view intersection point of the optical axes.