The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 16, 2021

Filed:

Mar. 01, 2018
Applicant:

Kabushiki Kaisha Toshiba, Minato-ku, JP;

Inventors:

Kazuhiro Itsumi, Koto, JP;

Tomio Ono, Yokohama, JP;

Assignee:

Kabushiki Kaisha Toshiba, Minato-ku, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/20 (2006.01); B06B 1/06 (2006.01); G10K 11/26 (2006.01); G01N 29/11 (2006.01); G07D 7/08 (2006.01); H01L 41/047 (2006.01); G01N 29/27 (2006.01); G01N 29/24 (2006.01); G07D 7/189 (2016.01);
U.S. Cl.
CPC ...
H01L 27/20 (2013.01); B06B 1/0622 (2013.01); B06B 1/0662 (2013.01); G01N 29/11 (2013.01); G01N 29/2437 (2013.01); G01N 29/27 (2013.01); G07D 7/08 (2013.01); G07D 7/189 (2017.05); G10K 11/26 (2013.01); H01L 41/0472 (2013.01); G01N 2291/0237 (2013.01); G01N 2291/048 (2013.01); G01N 2291/106 (2013.01); G01N 2291/2632 (2013.01);
Abstract

According to one embodiment, a transducer includes first structure sections and second structure sections. The first structure sections are spaced from each other in a first direction. Part of each of the first structure sections is fixed. The each of the first structure sections includes a first membrane part, a first piezoelectric part, a first conductive part, and a first electrode. The second structure sections are spaced from each other in the first direction. Part of each of the second structure sections is fixed. The each of the second structure sections includes a second membrane part, a second piezoelectric part, a second conductive part, and a second electrode. The second structure sections are spaced from the first structure sections in the first direction. Pitch along the first direction of the second structure sections is shorter than pitch along the first direction of the first structure sections.


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