The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2021
Filed:
Oct. 11, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Luke W. Bonecutter, Cedar Park, TX (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67772 (2013.01); H01L 21/67766 (2013.01); H01L 21/67775 (2013.01); H01L 21/67778 (2013.01);
Abstract
A load port includes a panel including a back surface configured to face a front side of a housing of a factory interface. A groove formed in the back surface extends along an outer portion of the panel. The groove includes a flared base region and a neck region that extends to the flared base region. The load port further includes a seal seated in the groove. The seal is configured to engage the front side of the housing responsive to the panel being coupled to the front side of the housing.