The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2021
Filed:
Feb. 24, 2018
Nps Corporation, Hwaseong-Si, KR;
Ji Young Jeong, Osan-Si, KR;
Kyung Chun Jung, Suwon-Si, KR;
Abstract
The present disclosure relates to a heat source device and a substrate processing apparatus including same. The substrate processing apparatus includes: a chamber having an inner space in which a substrate is processed; a substrate support provided inside the chamber and supporting the substrate; and a heat source device including a supporting body provided in at least one side of the chamber, and a heat source unit provided parallel to the substrate support so as to heat the substrate. The heat source unit is provided with a first light transmission conduit connected to the supporting body, a heat source provided inside the first light transmission conduit, and a first cooling conduit provided inside the first light transmission conduit while being spaced apart from the heat source, and having a first spraying hole to spray a cooling gas. The temperature of the substrate may be efficiently controlled.