The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2021
Filed:
Jan. 21, 2020
Canon Kabushiki Kaisha, Tokyo, JP;
Hisashi Namba, Utsunomiya, JP;
Yuichi Takahashi, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
An imprint apparatus comprises: a dispensing unit that dispenses a liquid to a substrate; a first measurement unit that measures a time from when a signal for causing the liquid to be dispensed is outputted to the dispensing unit until when the dispensed liquid passes through a predetermined position; a second measurement unit that measures a position of the liquid on the substrate that is dispensed by the dispensing unit; and a control unit that controls the measurement by the first measurement unit and the second measurement unit, wherein the control unit performs measurement by the second measurement unit based on a measurement result by the first measurement unit.