The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2021
Filed:
Jun. 30, 2017
Nippon Light Metal Company, Ltd., Tokyo, JP;
Yoshihiro Taguchi, Shizuoka, JP;
Takayuki Yamaguchi, Shizuoka, JP;
Jun Yu, Shizuoka, JP;
Yasuo Ishiwata, Shizuoka, JP;
NIPPON LIGHT METAL COMPANY, LTD., Tokyo, JP;
Abstract
The present invention provides a pellicle frame which can effectively inhibit deformation of an exposure master plate () caused by affixing the pellicle (), and which does not have a complex shape, and a pellicle which uses said pellicle frame are provided. The pellicle frame with an anodized film on a surface of an aluminum alloy frame is characterized in that: the aluminum alloy frame comprises an aluminum alloy which contains Ca: 5.0 to 10.0% by weight with the remainder aluminum and unavoidable impurities are contained, and has an area (volume) ratio of an AlCa phase, which is a dispersed phase, is greater than or equal to 25%, and a crystal structure of a part of the AlCa phase is monoclinic; wherein the anodized film contains AlCa particles.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile