The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2021
Filed:
Apr. 21, 2016
Canon Kabushiki Kaisha, Tokyo, JP;
Canon Precision Inc., Hirosaki, JP;
Hirotake Ando, Tokyo, JP;
Seiyo Aizu, Tsugaru, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
A stage apparatus comprises an incremental scale fixed to a movable unit and having a predetermined length shorter than a distance the movable unit can move in a first direction, a first and a second sensor that are arranged in the first direction with an interval therebetween shorter than the predetermined length, and a detection unit that detects an origin point position set in a movable range of the movable unit. In an origin return, if the movable unit is at a position at which both the first sensor and the second sensor can read the scale, the apparatus moves the movable unit to the origin point position by a predetermined distance, then moves the movable unit at a lower speed until the origin point position is detected.