The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2021
Filed:
Apr. 25, 2017
Tricorntech Taiwan, Taipei, TW;
TRICORNTECH TAIWAN, Taipei, TW;
Abstract
The disclosure describes embodiments of an airborne molecular contamination (AMC) monitoring apparatus. The AMC apparatus includes a manifold having a plurality of inlets and one or more outlets. A sampling tube bus fluidly is coupled to the manifold, the sampling tube bus comprising a plurality of individual sampling tubes, each individual sampling tube being fluidly coupled to one of the plurality of inlets. One or more analyzers are each fluidly coupled to one of the one or more outlets of the manifold to analyze fluid drawn into the manifold through one or more of the plurality of individual sampling tubes. A control and communication system coupled to the one or more analyzers. Other embodiments are described and claimed.