The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2021
Filed:
Apr. 05, 2018
Analog Devices, Inc., Norwood, MA (US);
Jeffrey A. Gregory, Malden, MA (US);
Charles Blackmer, Londonderry, NH (US);
Analog Devices, Inc., Wilmington, MA (US);
Abstract
Microelectromechanical systems (MEMS) devices (such as gyroscopes) configured to reject quadrature motion are described. Quadrature motion arises for example when the drive motion of a gyroscope couples to the sense motion of a gyroscope even in the absence of an angular motion. In some circumstances, quadrature motion may result from the fact that the springs used in a gyroscope have slanted sidewall, which can impart torque in the mechanics of the gyroscope. MEMS gyroscope of the type described herein may be configured to reject quadrature motion by using only springs oriented substantially parallel to the drive direction. One such spring includes only beams parallel the drive directions, and optionally. These MEMS gyroscopes may be used to sense, among others, roll and pitch angular rates.