The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2021
Filed:
Jul. 22, 2019
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Young-Chul Kwon, Asan-si, KR;
Man-Hee Han, Cheonan-si, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/53 (2014.01); H01L 21/78 (2006.01); B23K 26/06 (2014.01); B23K 26/073 (2006.01); B23K 26/067 (2006.01); B23K 26/08 (2014.01); B23K 26/70 (2014.01);
U.S. Cl.
CPC ...
B23K 26/53 (2015.10); B23K 26/0652 (2013.01); B23K 26/0676 (2013.01); B23K 26/0738 (2013.01); B23K 26/0853 (2013.01); H01L 21/78 (2013.01); B23K 26/0648 (2013.01); B23K 26/707 (2015.10);
Abstract
A laser apparatus may include a spectrum controller and a spectrum modulator. The spectrum controller may control a center wavelength and/or a bandwidth of a spectrum of a laser beam. The spectrum modulator may modulate the spectrum of the laser beam having the center wavelength and/or the bandwidth controlled by the spectrum controller. Thus, the laser beam may have the spectrum optimal for a semiconductor fabrication process. Particularly, the substrate may be accurately diced using the laser beam having the optimal spectrum.