The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2021
Filed:
Jul. 26, 2018
Applicant:
Samsung Display Co., Ltd., Yongin-si, KR;
Inventors:
Myung-Soo Huh, Yongin-si, KR;
Suk-Won Jung, Yongin-si, KR;
Jin-Kwang Kim, Yongin-si, KR;
In-Kyo Kim, Yongin-si, KR;
Choel-Min Jang, Yongin-si, KR;
Assignee:
Samsung Display Co., Ltd., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/56 (2006.01); H01J 37/32 (2006.01); C23C 16/452 (2006.01);
U.S. Cl.
CPC ...
H01L 51/56 (2013.01); C23C 16/452 (2013.01); H01J 37/32357 (2013.01);
Abstract
A vapor deposition apparatus for forming a deposition layer on a substrate, the vapor deposition apparatus includes a supply unit configured to receive a first source gas, a reaction space connected to the supply unit, a plasma generator in the reaction space, a first injection unit configured to inject a deposition source material to the substrate, the deposition source material including the first source gas, and a filament unit in the reaction space, the filament unit being connected to a power source.