The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2021
Filed:
May. 18, 2018
Applied Materials, Inc., Santa Clara, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Karuppasamy Muthukamatchi, Madurai, IN;
Nir Merry, Mountain View, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Electronic device manufacturing apparatus and robot apparatus are described. The apparatus are configured to efficiently pick and place substrates wherein the robot apparatus includes an upper arm and three blades B, B, Bthat are independently rotatable. The three blades are configured to service a first dual load lock and second dual load lock wherein each dual load lock includes a different pitch. In some embodiments, a first pitch Pis smaller than a second pitch P. Blades Band B(or optionally blades Band B) can service the first dual load lock with Pitch Pand blades Band Bcan service the second dual load lock including the second pitch P. Methods of operating the electronic device manufacturing apparatus and the robot apparatus are provided, as are numerous other aspects.