The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2021
Filed:
Jan. 17, 2018
Applicant:
Oxford Instruments Technologies Oy, Espoo, FI;
Inventor:
Nikolai Chekurov, Helsinki, FI;
Assignee:
Oxford Instruments Technologies Oy, Espoo, FI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05G 1/00 (2006.01); H01J 5/18 (2006.01); G01T 7/00 (2006.01);
U.S. Cl.
CPC ...
H01J 5/18 (2013.01); G01T 7/00 (2013.01);
Abstract
According to an example aspect of the present invention, there is provided a method comprising obtaining a first silicon wafer comprising a mask on a first side, attaching a second silicon wafer on the first side of the first silicon wafer, and etching one of the wafers to partially expose a window layer deposited on the opposite silicon wafer and to leave a structure defined by the mask supporting the window layer.