The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2021
Filed:
Feb. 28, 2019
Toshiba Memory Corporation, Tokyo, JP;
Kazuhiro Nojima, Yokkaichi Mie, JP;
Tomohide Tezuka, Yokohama Kanagawa, JP;
Atsushi Onishi, Nagoya Aichi, JP;
Kazuhiro Yamada, Yokohama Kanagawa, JP;
Shigeki Nojima, Yokohama Kanagawa, JP;
Akira Hamaguchi, Kobe Hyogo, JP;
TOSHIBA MEMORY CORPORATION, Tokyo, JP;
Abstract
An apparatus for inspecting a defect includes a memory storage and a processing unit coupled to the memory storage. The processing unit is configured to acquire pattern data for one or more patterns implemented on a wafer from a storage device, clip a portion that corresponds to the pattern data from a figure indicated by design data to generate design information and one or more circuit patterns, assign a first set of numbers to the one or more patterns of the pattern data, assign a second set of numbers to the one or more circuit patterns of the design information, generate relation information indicative of one or more correspondences between the first set of numbers and the second set of numbers, verify whether or not the one or more patterns indicated by the pattern data constitute a crucial defect based on the relation information, and send a verification result to a device.