The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 09, 2021

Filed:

Jun. 21, 2016
Applicant:

Shimadzu Corporation, Kyoto, JP;

Inventors:

Takahide Hatahori, Kyoto, JP;

Yuya Nagata, Kyoto, JP;

Kenji Takubo, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 29/06 (2006.01); G01N 29/24 (2006.01); G01N 29/34 (2006.01); G01N 29/04 (2006.01); G01N 29/44 (2006.01); G01N 29/36 (2006.01); G01H 3/12 (2006.01); G01B 9/02 (2006.01); G01H 9/00 (2006.01);
U.S. Cl.
CPC ...
G01N 29/069 (2013.01); G01B 9/02098 (2013.01); G01H 3/125 (2013.01); G01H 9/002 (2013.01); G01N 29/043 (2013.01); G01N 29/0654 (2013.01); G01N 29/2418 (2013.01); G01N 29/345 (2013.01); G01N 29/36 (2013.01); G01N 29/4472 (2013.01); G01N 2291/0289 (2013.01); G01N 2291/263 (2013.01);
Abstract

The defect inspection device is provided with a sound wave excitation unit for exciting a sound wave having a time waveform represented by a continuous periodic function to a prescribed position on the surface of an object to be measured, a displacement amount measurement unit for measuring a periodically varying displacement amount generated by the propagation of the sound wave from the prescribed position through the surface at at least three different phases of the periodic variation, and a periodic function acquisition unit for determining a periodic function expressing the periodic variation of the physical quantity on the basis of the displacement amount at the at least three different phases.


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