The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2021
Filed:
Mar. 07, 2019
Applicant:
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Inventors:
Domenico Giusti, Monza, IT;
Oriana Rita Antonia Di Marco, Milan, IT;
Igor Varisco, Settimo Milanese, IT;
Assignee:
STMicroelectronics S.r.l., Agrate Brianza, IT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 99/00 (2006.01); A61M 16/20 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); A61M 39/22 (2006.01);
U.S. Cl.
CPC ...
F16K 99/0048 (2013.01); A61M 16/202 (2014.02); A61M 16/204 (2014.02); A61M 39/22 (2013.01); B81B 3/0021 (2013.01); B81C 1/0015 (2013.01); B81C 1/00182 (2013.01); F16K 99/0007 (2013.01); A61M 2039/226 (2013.01); A61M 2205/0294 (2013.01); A61M 2207/10 (2013.01); B81B 2201/054 (2013.01); F16K 2099/0086 (2013.01); Y10T 137/87314 (2015.04);
Abstract
A valve module includes a semiconductor body, cavities in the semiconductor body separated from each other by a distance, a cantilever structure suspended over each cavity to enable at least partial closing of the cavity, and a piezoelectric actuator for each cantilever structure. The piezoelectric actuator is configured for use to cause a positive bending of the respective cantilever structure and so modulate a rate of air flow through the valve module.