The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 09, 2021

Filed:

Mar. 05, 2019
Applicant:

Government of the United States, As Represented BY the Secretary of the Air Force, Wright-Patterson AFB, OH (US);

Inventors:

Michael R. Snure, Dayton, OH (US);

Gene P. Siegel, Beavercreek, OH (US);

Catalin S. Badescu, Dublin, OH (US);

Cristian Ciobanu, Golden, CO (US);

Badri Narayanan, Clarendon Hills, IL (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/02 (2006.01); C30B 25/10 (2006.01); H01L 21/02 (2006.01); C30B 29/68 (2006.01); C30B 25/18 (2006.01); C30B 29/38 (2006.01);
U.S. Cl.
CPC ...
C30B 25/10 (2013.01); C30B 25/18 (2013.01); C30B 29/38 (2013.01); C30B 29/68 (2013.01); H01L 21/02112 (2013.01); H01L 21/02271 (2013.01);
Abstract

A method of forming a spboron nitride (BN) layer on a surface of a substrate, the method comprising providing first and second precursors at the surface of the substrate, the first precursor being a source of boron and the second precursor being a source of nitrogen; heating the substrate to a temperature greater than a pyrolysis point for either of the first and second precursors; pyrolyzing the first precursor at the surface of the substrate; activating the second precursor at the surface of the substrate with the pyrolyzed first precursor; and adsorbing the pyrolyzed first precursor and the activated second precursor onto the surface of the substrate.


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