The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2021
Filed:
Sep. 17, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Aseem K. Srivastava, Andover, MA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method of forming an electrically insulating barrier between a source contact and a drain contact of a transistor device including an electrically insulating layer disposed atop a semi-conductive layer, and an electrically conductive layer disposed atop the electrically insulating layer, the source contact and the drain contact extending from the electrically conductive layer through the electrically insulating layer to the semi-conductive layer, the method including disposing a hardmask layer atop the electrically conductive layer, disposing a photoresist layer atop the hardmask layer, performing a photolithography process to form a trench in the hardmask layer to expose an underlying portion of the electrically conductive layer spanning between the source contact and the drain contact, and performing an ion implantation process, wherein an ion beam formed of ionized oxygen atoms is directed into the trench to oxidize the exposed portion of the electrically conductive layer.