The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2021
Filed:
Aug. 31, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Ilias Iliopoulos, Foster City, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); G05B 23/02 (2006.01); H01L 21/687 (2006.01); H01J 37/244 (2006.01); H01L 21/67 (2006.01); G01N 21/88 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32926 (2013.01); G05B 23/0283 (2013.01); H01J 37/244 (2013.01); H01J 37/3288 (2013.01); H01J 37/3299 (2013.01); H01J 37/32715 (2013.01); H01J 37/32935 (2013.01); H01L 21/67115 (2013.01); H01L 21/68785 (2013.01); G01N 21/8806 (2013.01); H01J 37/32724 (2013.01); H01J 37/32733 (2013.01); H01J 2237/20214 (2013.01); H01J 2237/20235 (2013.01); H01L 21/67069 (2013.01);
Abstract
In one embodiment of the invention, a method for predicting a susceptor's service life in a processing chamber is disclosed. The method begins by creating virtual sensors in a processing chamber having a susceptor. The virtual sensors monitor one or more parameters on the susceptor and the age of the susceptor is tracked throughout the susceptor's life in the processing chamber with the virtual sensors.