The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2021
Filed:
Aug. 08, 2017
Hitachi, Ltd., Tokyo, JP;
Yuudai Kamada, Tokyo, JP;
Atsushi Isobe, Tokyo, JP;
Noriyuki Sakuma, Tokyo, JP;
Chisaki Takubo, Tokyo, JP;
Tomonori Sekiguchi, Tokyo, JP;
HITACHI, LTD., Tokyo, JP;
Abstract
Provided is an acceleration sensor having a large mass in a movable portion, and realizing high impact resistance. An acceleration sensor elementincludes an upper substrate, a lower substratespaced apart from the upper substrate, and an intermediate substrateprovided between the upper substrateand the lower substrate. Each of a first movable portion, a second movable portion, a frame portion, a fixed portion, and a spring portionconstituting the intermediate substrateis configured with two layers of an upper layer and a lower layer, and a stopper portionis provided at one end of the frame portion. A distancebetween an end portion of the first movable portionor the second movable portionand an end portion of the stopper portionin the upper layer and a distancebetween an end portion of the first movable portionor the second movable portionand an end portion of the stopper portionin the lower layer are different from each other.