The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2021
Filed:
Apr. 19, 2018
Applicant:
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Inventors:
Elio Guidetti, Montano Lucino, IT;
Mohammad Abbasi Gavarti, Milan, IT;
Daniele Caltabiano, Agrate Brianza, IT;
Gabriele Bertagnoli, Turin, IT;
Assignee:
STMICROELECTRONICS S.r.l., Agrate Brianza, IT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 1/18 (2006.01); G01L 25/00 (2006.01); G01L 5/162 (2020.01); G01M 5/00 (2006.01);
U.S. Cl.
CPC ...
G01L 1/18 (2013.01); G01L 5/162 (2013.01); G01L 25/00 (2013.01); G01M 5/0041 (2013.01); G01M 5/0083 (2013.01);
Abstract
A stress sensor formed by a membrane plate; a first bonding region arranged on top of the membrane plate; a cover plate arranged on top of the first bonding region, the first bonding region bonding the membrane plate to the cover plate; three-dimensional piezoresistive elements extending across the membrane plate that are embedded in the bonding layer; and planar piezoresistive elements that extend across the membrane plate and are surrounded by and separated from the bonding layer.