The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2021
Filed:
May. 07, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jennifer Y. Sun, Mountain View, CA (US);
Biraja P. Kanungo, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/50 (2006.01); C04B 35/505 (2006.01); C23C 14/08 (2006.01); C04B 35/626 (2006.01); C04B 37/00 (2006.01); C04B 37/02 (2006.01); H01L 21/687 (2006.01); C23C 16/44 (2006.01); H01J 37/32 (2006.01); C23C 4/11 (2016.01); C23C 4/134 (2016.01); C04B 35/622 (2006.01); C23C 16/40 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); C23C 16/455 (2006.01); C23C 16/50 (2006.01); C23C 14/22 (2006.01);
U.S. Cl.
CPC ...
C04B 35/50 (2013.01); C04B 35/505 (2013.01); C04B 35/62222 (2013.01); C04B 35/62655 (2013.01); C04B 37/001 (2013.01); C04B 37/02 (2013.01); C23C 4/11 (2016.01); C23C 4/134 (2016.01); C23C 14/221 (2013.01); C23C 16/405 (2013.01); C23C 16/4401 (2013.01); C23C 16/45525 (2013.01); C23C 16/50 (2013.01); H01J 37/32082 (2013.01); H01L 21/67069 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H01L 21/6833 (2013.01); H01L 21/68757 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3224 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3244 (2013.01); C04B 2235/3418 (2013.01); C04B 2235/656 (2013.01); C04B 2235/96 (2013.01); C04B 2235/9669 (2013.01); C04B 2237/34 (2013.01); C04B 2237/341 (2013.01); C04B 2237/348 (2013.01); C04B 2237/40 (2013.01);
Abstract
An article comprises a plasma resistant ceramic material comprising YOat a concentration of approximately 30 molar % to approximately 60 molar %, ErOat a concentration of above 30 molar % to approximately 60 molar %, and at least one of ZrO, GdOor SiOat a concentration of over 0 molar % to approximately 30 molar %.