The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2021
Filed:
Feb. 13, 2018
Nissin Electric Co., Ltd., Kyoto, JP;
NISSIN ELECTRIC CO., LTD., Kyoto, JP;
Abstract
The impedance of an antenna is reduced and gaps generated between electrodes constituting a capacitance element and a dielectric body are eliminated. An antenna () for generating inductively coupled plasma P includes at least two conductor elements (), an insulation element () that is arranged between the mutually adjacent conductor elements () and insulates the conductor elements (), and a capacitance element () that is connected electrically to and in series with the mutually adjacent conductor elements (). The capacitance element () is configured from a first electrode (A) electrically connected to one of the mutually adjacent conductor elements (), a second electrode (B) electrically connected to the other of the mutually adjacent conductor elements (), and a liquid dielectric body filling the space between the first electrode (A) and the second electrode (B).