The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2021
Filed:
Jun. 29, 2017
Teknologian Tutkimuskeskus Vtt Oy, Espoo, FI;
Antti Jaakkola, Espoo, FI;
Panu Pekko, Espoo, FI;
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY, Espoo, FI;
Abstract
The present disclosure describes a micromechanical resonator comprising a resonator element () having a length (l) and a width (w) that is perpendicular to the length. The resonator element has a length-to-width aspect ratio in a range of 1.8 to 2.2. The resonator element is suspended to a support structure with two or more anchors (). Each of the two or more anchors is attached to a first location or a second location. The first location is at a shorter side () of the resonator element. The first location divides the width (w) of the resonator element into a larger portion (w) and a smaller portion (w) such that a ratio between said smaller portion (w) and the whole width (w) is in a range of 0.10 to 0.28. The second location is at a longer side (). The second location divides the length (l) of the resonator element into a larger portion (l) and a smaller portion (l) such that a ratio between said smaller portion (l) and the whole length (l) is in a range of 0.36 to 0.48.