The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 23, 2021

Filed:

Aug. 29, 2017
Applicant:

Lg Display Co., Ltd., Seoul, KR;

Inventors:

Namkook Kim, Suwon-si, KR;

Jejun Park, Seoul, KR;

Seunglyul Lee, Paju-si, KR;

Taejoon Song, Paju-si, KR;

Shinbok Lee, Seoul, KR;

Kyunghoon Lee, Goyang-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/56 (2006.01); H01L 51/56 (2006.01); H01L 51/00 (2006.01); C23C 14/04 (2006.01); C23C 16/04 (2006.01); C23C 16/06 (2006.01); C23C 16/448 (2006.01); C23C 16/46 (2006.01); C23C 16/54 (2006.01);
U.S. Cl.
CPC ...
H01L 51/56 (2013.01); C23C 14/042 (2013.01); C23C 14/562 (2013.01); C23C 16/042 (2013.01); C23C 16/06 (2013.01); C23C 16/448 (2013.01); C23C 16/463 (2013.01); C23C 16/545 (2013.01); H01L 51/0003 (2013.01);
Abstract

In a roll to roll fabricating system, a plurality of deposition units are provided, and a turning unit is disposed between the deposition units. The deposition units include: a deposition drum on which a film is wound; and one or more evaporators disposed to face the deposition drum, and configured to deposit the film wound on the deposition drum. The turning unit includes a plurality of turning rolls, and is configured to turn the film output from one deposition unit, to guide the film, and to supply the film to another deposition unit.


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