The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2021
Filed:
Apr. 25, 2019
Samsung Electronics Co., Ltd., Suwon-si, KR;
Ki-Don Lee, Austin, TX (US);
Zack Tran Mai, Austin, TX (US);
Abstract
A method for detecting overlay misalignment of a semiconductor device uses a test structure that includes a sensor structure and a via-chain structure. The sensor structure is disposed in a first layer on a semiconductor substrate and includes a plurality of first conductive lines extending in a first direction. Each first conductive line is separated from an adjacent first conductive line in a second direction by a first space. The via-chain structure is in a second layer above the first layer and between the first layer and the second layer. The via-chain structure includes at least one second conductive line disposed in the second layer and at least one via electrically connected to each second conductive line and extending toward the first layer. The at least one via is disposed in the first space between the adjacent first conductive lines of the sensor structure.