The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2021
Filed:
Dec. 26, 2019
Wisconsin Alumni Research Foundation, Madison, WI (US);
The Regents of the University of New Mexico, Albuquerque, NM (US);
Max G. Lagally, Madison, WI (US);
Francesca Cavallo, Albuquerque, NM (US);
Vijay Saradhi Mangu, Albuquerque, NM (US);
Wisconsin Alumni Research Foundation, Madison, WI (US);
The Regents of the University of New Mexico, Albuquerque, NM (US);
Abstract
Methods for fabricating thin, high-aspect-ratio Ge nanostructures from high-quality, single-crystalline Ge substrates are provided. Also provided are grating structures made using the methods. The methods utilize a thin layer of graphene between a surface of a Ge substrate, and an overlying resist layer. The graphene passivates the surface, preventing the formation of water-soluble native Ge oxides that can result in the lift-off of the resist during the development of the resist.